Vacuum Chambers & Optical Equipment

Our experience manufacturing custom vacuum chambers and process equipment stretches back to the 1960s and our early work for the fledgling computer and semiconductor industry. Over the decades we've branched out to provide custom vacuum chambers, cooling shrouds and traces, showerheads, gas injectors and countless other custom vacuum componentry to various industries.

 
 A custom vacuum chamber with cooling traces.

A custom vacuum chamber with cooling traces.

 

We have an intimate understanding of the variety of disciplines required for successful, high-quality vacuum work including rolling, welding and forming, machining of welded structures and helium leak testing.

While many of our clients are in the semiconductor industry, we also actively work in affiliated industries that require similar technical approaches. These industries, notably those that require precise angular features and intersection points, are often laser and energy beam related. Imperial Machine & Tool Co. works closely with the Advanced Scientific community at leading research institutions, national laboratories and technologically advanced commercial houses to provide components and assemblies that meet the most stringent standards for quality, cleanliness and vacuum integrity.

 
 A custom vacuum chamber lid with coolant ports.

A custom vacuum chamber lid with coolant ports.

 

In addition to our decades long expertise using conventional subtractive methods Imperial has recently been using our metal additive manufacturing expertise to unlock higher performance through advanced internal cooling and other design improvements. Of particular note are higher processing temperatures realized using conformal cooling channels - channels that conform closely to the process surface(s) being cooled. Imperial’s ability to create radical geometries and internal features via Additive has led to revolutionary advances in MOCVD and related semiconductor applications.

 

If you have questions about our specific capabilities please contact us, we'd be happy to answer your questions.